Nanoimprint Equipment

Nanoimprint Equipment
  • Excellent mold reproducibility is implemented for a volume production
  • A collective Nanoimprint technology is available for various size (from a small area to a large area)
  • Both methods (Thermal and UV) are available
  • Multifunctional (“Auto mold release mechanism”, “Vacuum treatments”, “Atmosphere control”, “High temperature imprint”, etc.)
  • Operability (Very simple and human friendly functional design)
  • Clean room correspondence (Seal of actuator)

Type of Nanoimprint Equipment

X100-U

UV式ナノインプリント装置 X100-U

This model is most suitable for initial introduction, and it is a cheap edition UV-type Nanoimprint Equipment. 
A high efficiency LED UV light source, large work size, and vacuum mechanism are included.

Type:UV Nanoimprint Equipment
UV light output:30mW/cm2
Maximum load:4,000N
Vacuum treatments pressure:300Pa
Note: The vacuum pump is optional.
Maximum work size:□100mm
UV irradiation position:Upper side
External dimensions & weight:W400xH880xD400(mm) & 120kg

X300

熱式・UV式ナノインプリント装置 x300

This model can be used from R&D to pilot production.

TypeUV/Thermal Nanoimprint Equipment
Transfer method A collective Nanoimprint
Transferred material UV Cure Resin, Thermoplastic Resin, Thermal Cure Resin
Maximum service temperature 250℃、650℃(Option)
Maximum load50kN
Stage speedMax. 15mm/sec, Min. 50nm/sec, Arbitrary operation speed, Backlash cancellation mechanism
Maximum work sizeφ150mm
Standard work holding mechanismVacuum suction
UV functionWavelength 365nm/385nm, UV irradiation area □100mm
Maximum pressure2MPa
Maximum service temperature 100℃
Vacuum mechanismVacuum chamber is standard
Vacuum pumpStandard target control pressure/300pa
Atmosphere controlAssume the vacuum chamber as an arbitrary gas atmosphere
OperationTouch panel, PC Control/Data logger
Automatic operation with 20 steps arbitrary operation circuit
External dimensions & weightW900xH1,800xD1,300(mm) & 1,250kg

X500

熱式、UV式ナノインプリント装置 x500

“This model can be used from R&D to pilot production.
(It can be used φ8″” maximum)”

TypeUV/Thermal Nanoimprint Equipment
Transfer methodA collective Nanoimprint
Transferred materialUV Cure Resin, Thermoplastic Resin, Thermal Cure Resin
Maximum service temperature350℃
Maximum load100kN
Stage speed Max. 15mm/sec, Min. 50nm/sec, Arbitrary operation speed, Backlash cancellation mechanism
Maximum work sizeφ200mm
Standard work holding mechanismVacuum suction
UV functionWavelength 365nm/385nm, UV irradiation area φ200m
Maximum pressure2MPa
Maximum service temperature
100℃
Vacuum mechanism Vacuum chamber is standard
Vacuum pumpStandard target control pressure/300pa
Atmosphere controlAssume the vacuum chamber as an arbitrary gas atmosphere
OperationTouch panel, PC Control/Data logger
Automatic operation with 20 steps arbitrary operation circuit
External dimensions & weightW900xH1,990xD1,650(mm) & 1,500kg

OptoSCAN700 (Macro Inspection Device)

マクロ欠陥検査装置 OptoScan-700(マクロ検査装置)

Macro inspection of NIL molds and replica films is also possible. NIL molds and replica films are viewed in the macro visual field and any pattern defects or mold removal non-uniformity can be detected quickly.

●Mold Evaluation and Analysis
●Various Pattern Geometries and Mold Materials (Ni, Fused Silica, Resin, etc.)
●Monitoring of Release Agent Degradation and Film Delamination
●Evaluation and Analysis of Transferred Pattern Uniformity
●SCIVAX uses proprietary technology to achieve high speed and high sensitivity product imaging

TypeDefect inspection apparatus
Maximum work size300mmx300mm, 0.1mm~10mm thickness
Please contact us for less than 0.1mm thickness.
Image sensor 2,048 pixels, CCD line sensor camera (B/W)
Demonstration with OptoScan700

This model inspects nano-patterns, and it has many inquiries of prospective.
SCIVAX can demonstrate functionality of OptoScan-700.

Contents of the demonstration

1. Standard demo: It is the standard demonstration using our sample. It takes about a half day.
2. Individual evaluation test: It is the evaluation test using the sample that a visitor was brought. It takes 1 or 2 days. 

 

Contents of the demonstration

1. Standard demo: It is the standard demonstration using our sample. It takes about a half day.
2. Individual evaluation test: It is the evaluation test using the sample that a visitor was brought. It takes 1 or 2 days. 
Note: About item 2, we need a prior meeting and prior examination.
Please feel free to inquire for the details.

Place of the demonstration

SCIVAX Corporation (Kawasaki R&D Center)

Defect Inspection Examples

Equipment for Volume Production Services

With SCIVAX’s leading‐edge equipment, we can offer various Volume Production Service which is optimum for your needs.

Feature SpecificationRemarks
Large Area TypeAt most G5 (1,100mmX1,300mm) substrateFor Glass Substrate only
Multiple substratesAvailableVarious wafer size is acceptable
Mold release mechanismAvailableSelect the most suitable mold release method according to conditions
AlignmentAvailable
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