Nanoimprint Foundry

SCIVAX Nanoimprint Foundry
(Nanoimprint Volume Production Services)

SCIVAX offers a one-stop solution for nano-patterning from basic optical simulation to volume production foundry services.

It is not possible manufacture devices with NIL technology alone. SCIVAX has built a unique nano-foundry platform integrating the unique NIL technology plus other necessary fab technologies.

Optical Design and Simulation

In many cases, commercially available optical simulation software does not meet customer’s needs. SCIVAX’s optical simulation experts have developed sophisticated techniques using conventional simulation tools in combination with independently developed special tools to allow us to deliver custom simulation solutions.

  • Service Introduction
  • Simulation Flow
  • Examples
ラインアンドスペース

Custom Mold

SCIVAX can fabricate custom master molds according to customers’ unique requirements. Small mold for R&D to large molds for large area production applications can all be supplied based on individual requirements.

Film Deposition/Evaporation

Deposition of SiO2, SiN, Metal films, etc.

Nanoimprint

SCIVAX can, of course, process silicon wafers, but also wide variety of other substrates including compound semiconductor wafers and large area glass substrates can also be imprinted in our foundry with SCIVAX’s unique single-shot NIL technology.
・Wafers(φ2″~φ12″)
・Glass Substrates (Maximum 1,100mmX1,300mm)
・Glass Lenses
・Metal Substrates
・All types of films/sheets and other substrates

Etching & Cleaning

With our originally developed Large Area Nanoimprint Technology, the cost for processing can be drastically reduced, so it is sp reading to various applications now.
“For large area glass: single-shot fabrication on G5 (1,100mmX1,300mm)” and “For wafer fabrication: high throughput at most φ8 inches” can be done.

外観検査装置INSPECTRA

Inspection & Measurement

High precision inspection and measurement can be performed with SCIVAX sophisticated metrology tool set.
Inspection/measurement for surface condition, CD, pattern defects, particles/contamination. We also offer macro inspection systems for sale.

  • Low Cost Custom Molds
  • Mixed Pattern Mold
  • Large Area Molds
  • Mold List

Nanoimprint Production Foundry Services

In order to conduct volume manufacturing for devices with nanostructures, a high level specification of environmental cleanliness and strict management of the same is a requirement. SCIVAX has established a manufacturing facility in Toyama Prefecture that features a state-of-the-art cleanroom.

  • Volume Manufacturing
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