Production Foundry Services
Production Foundry
What is a production foundry?
We provide the highest quality nano-imprinting services with our highly clean and controlled state-of-the-art manufacturing facilities.
Volume Production Foundry
We have designed our cleanroom to achieve the highest levels of cleanliness using the best known methods at both in terms of structure and operation.
SCIVAX Production Factory
FFU (all with HEPA filtration)
Grated floor
Particle Retention Minimization by Vertical Unidirectional Flow Method (FFU with ceiling HEPA filters and grated floor)
Anti-particule measures
– Prevention of airborne particles from entering the CR by room differential pressure control
– Minimizing human-induced particles by wearing innerwear and clean suits when entering the room.
– Vertical unidirectional flow system + grating floor system to minimize particle retention
– Maximizing the ventilation frequency to maintain high cleanliness
Cleanroom Specifications
| Item | Performance | |
| Air Flow Rate | 0.4 | m/sec |
| Cleanroom Air Replacement Rate | 247 | times/hour |
| Filtration Efficiency | 99.9995 | % |
| Temperature Control | 23.5±1 | ℃ |
| Humidity Control | RH40±10 | % |
| Airborne Particulate | ||
| ISO Standard 14644(JIS Standards) | ISO5 | |
| USA Standard 209E | Corresponds to class 100 | |
Pilot Production Site
Our Shinkawasaki R&D Center handles everything from optical simulation to mass production.
It is easy to access to, and we have a meeting space where you can meet with us at any time. Please feel free to contact us for more information.
| Offered Services | Nanoimprint Lithography, Optical Simulation, Etching and Other Foundry Services |
| Available Substrates Media | Silicon, compound semiconductor, resin films and substrates, metals and most types of substrates |
| Size | Tens of cm□～500mm□ |
| Imprint Curing Method | Thermal / UV |
| Location | 7-7 Shin-Kawasaki, Saiwai-Ku, Kanagawa, Japan 212-0032 |
Global Nano Micro Technology Business Incubation Center (NANOBIC)
Cleanroom View
Cleanroom
NANOBIC 7-7,
Shinkawasaki,
Saiwai-ku, Kawasaki City,
Kanagawa Prefecture
212-0032