Nanoimprint, microfabrication, foundry, custom mall total solution SCIVAX Ltd.
Production Foundry
What is a production foundry?
A state-of-the-art nano device manufacturing facility that maintains a high level of cleanliness control.We offer the highest quality NIL based production foundry services.
Volume Production Foundry
We have designed our cleanroom to achieve the highest levels of cleanliness using best known methods at both the cleanroom structural design and operation methods.
The SCIVAX Production Factory
Inside the Production Factory1
Inside the Production Factory2
FFU (all with HEPA filtration)
Grated floor
With vertical one-directional flow particulate contamination is held to a minimum (FFU with ceiling HEPA filters and grated floor)
Particle Countermeasures
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Cleanroom Specifications
| Item | Performance | |
|---|---|---|
| Air Flow Rate | 0.4 | m/sec |
| Cleanroom Air Replacement Rate | 247 | times/hour |
| Filtration Efficiency | 99.9995 | % |
| Temperature Control | 23.5±1 | ℃ |
| Humidity Control | RH40±10 | % |
| Airborne Particulate | ||
| ISO Standard 14644(JIS Standards) | ISO5 | |
| USA Standard 209E | Corresponds to class 100 | |
Pilot Production Site
The Kawasaki R&D Center can perform tasks from optical simulation to production ramp up.
The Kawasaki R&D Center is easy to get to and we have plenty of meeting space, so please feel free to visit us to discuss any requirements.
Global Nano Micro Technology Business Incubation Center (NANOBIC)
Cleanroom View
Cleanroom View
| Offered Services | Nanoimprint Lithography, Optical Simulation, Etching and Other Foundry Services |
| Available Substrates Media | Silicon, compound semiconductor, resin films and substrates, metals and most types of substrates |
| Size | Tens of cm□～500mm□ |
| Imprint Curing Method | Thermal / UV |
| Location | 7-7 Shin-Kawasaki, Saiwai-Ku, Kanagawa, Japan 212-0032 |
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