Production Foundry

What is a production foundry?
A state-of-the-art nano device manufacturing facility that maintains a high level of cleanliness control.We offer the highest quality NIL based production foundry services.

Volume Production Foundry

We have designed our cleanroom to achieve the highest levels of cleanliness using best known methods at both the cleanroom structural design and operation methods.

量産工場外観

The SCIVAX Production Factory

Inside the Production Factory1

量産工場内観2

Inside the Production Factory2

FFU (all with HEPA filtration)

Grated floor

With vertical one-directional flow particulate contamination is held to a minimum (FFU with ceiling HEPA filters and grated floor)

Particle Countermeasures

  1. Cleanroom pressure from room to room and air flow is controlled to minimize airborne particulate. 
  2. Strict gowning protocols minimize human’s contributions to particulate levels.
  3. With vertical one-directional flow and grated floor, particulate contamination is held to a minimum.
  4. To maximize cleanliness, air is exchanged at the maximum rate.

Cleanroom Specifications

ItemPerformance
Air Flow Rate0.4m/sec
Cleanroom Air Replacement Rate247times/hour
Filtration Efficiency99.9995%
Temperature Control23.5±1
Humidity ControlRH40±10%
Airborne Particulate
ISO Standard 14644(JIS Standards)ISO5
USA Standard 209ECorresponds to class 100

Pilot Production Site

The Kawasaki R&D Center can perform tasks from optical simulation to production ramp up.
The Kawasaki R&D Center is easy to get to and we have plenty of meeting space, so please feel free to visit us to discuss any requirements.

ナノ・マイクロ産学官共同研究施設

Global Nano Micro Technology Business Incubation Center (NANOBIC)

Cleanroom View

Cleanroom View

Offered ServicesNanoimprint Lithography, Optical Simulation, Etching and Other Foundry Services
Available Substrates MediaSilicon, compound semiconductor, resin films and substrates, metals and most types of substrates
SizeTens of cm□~500mm□
Imprint Curing Method Thermal / UV
Location7-7 Shin-Kawasaki, Saiwai-Ku, Kanagawa, Japan 212-0032
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