Production Foundry Services
Production Foundry
What is a production foundry?
A state-of-the-art nano device manufacturing facility that maintains a high level of cleanliness control.We offer the highest quality NIL based production foundry services.
Volume Production Foundry
We have designed our cleanroom to achieve the highest levels of cleanliness using best known methods at both the cleanroom structural design and operation methods.
The SCIVAX Production Factory
FFU (all with HEPA filtration)
Grated floor
With vertical one-directional flow particulate contamination is held to a minimum (FFU with ceiling HEPA filters and grated floor)
Particle Countermeasures
Cleanroom pressure from room to room and air flow is controlled to minimize airborne particulate.
Strict gowning protocols minimize human’s contributions to particulate levels.
With vertical one-directional flow and grated floor, particulate contamination is held to a minimum.
To maximize cleanliness, air is exchanged at the maximum rate.
Cleanroom Specifications
| Item | Performance | |
| Air Flow Rate | 0.4 | m/sec |
| Cleanroom Air Replacement Rate | 247 | times/hour |
| Filtration Efficiency | 99.9995 | % |
| Temperature Control | 23.5±1 | ℃ |
| Humidity Control | RH40±10 | % |
| Airborne Particulate | ||
| ISO Standard 14644(JIS Standards) | ISO5 | |
| USA Standard 209E | Corresponds to class 100 | |
Pilot Production Site
The Kawasaki R&D Center can perform tasks from optical simulation to production ramp up.
The Kawasaki R&D Center is easy to get to and we have plenty of meeting space, so please feel free to visit us to discuss any requirements.
| Offered Services | Nanoimprint Lithography, Optical Simulation, Etching and Other Foundry Services |
| Available Substrates Media | Silicon, compound semiconductor, resin films and substrates, metals and most types of substrates |
| Size | Tens of cm□～500mm□ |
| Imprint Curing Method | Thermal / UV |
| Location | 7-7 Shin-Kawasaki, Saiwai-Ku, Kanagawa, Japan 212-0032 |
Global Nano Micro Technology Business Incubation Center (NANOBIC)
Cleanroom View
Cleanroom
NANOBIC 7-7,
Shinkawasaki,
Saiwai-ku, Kawasaki City,
Kanagawa Prefecture
212-0032