Feature of SCIVAX's Nanoimprint Technology
"Nanoimprint onto large area" opens up the future of super nanofabrication technology
With our originally developed Large Area Nanoimprint Technology, the cost for processing can be drastically reduced, so it is spreading to various applications now.
“For large area glass: single-shot fabrication on G5 (1,100mmX1,300mm)” and “For wafer fabrication: high throughput at most φ8 inches” can be done.
Nanoimprint Foundry Service
(Volume Production Service)
Only with Nanoimprint Technology, a volume production can’t be realized. We make an effort for the fusion technology which is required for practical application, then we have constructed our original Foundry Platform for nanoscale patterning. Using our Foundry Service, you can drastically shorten your development time for new products.
SCIVAX's Nanoimprint
Technology
-
Single-shot fabrication on large area
Single-shot fabrication at most G5 (1,100mmX1,300mm) substrate -
Multi-Nanoimprint
Single-shot fabrication for multiple substrates -
Nanoimprint for substrates
with some warpage or non-flatness
Single-shot fabrication for substrates that flatness is not guaranteed -
Nanoimprint onto inorganic substrates
Fabrication onto other materials (Such as SiO2) -
Nanoimprint onto curved surfaces
Fabrication onto curved surfaces,
which include lens surfaces (concave or convex)
Alignment Technology
The global alignment accuracy across wafer (φ8” ) is ±3μm.
Pattern transfer with
high accuracy
For L&S with 100nm pitch, we can fabricate a pattern with precision at less than 0.1nm.
Some examples of our processing technology
Patterning onto sapphire substrates or compound semiconductors
Uniform patterning onto substrates with some warpage or non-flatness can be done.
Patterning onto lens curved surfaces
Molding onto lens surfaces (concave, convex, and both) can be done.
Patterning onto resin
We have many patterning experiences onto resin film/substrate.
Patterning onto large-area
glass
substrates
Uniform patterning at most G5 (1,100mmX1,300mm) substrate
can be done.
NANOBIC 7-7,
Shinkawasaki,
Saiwai-ku, Kawasaki City,
Kanagawa Prefecture
212-0032