TOP / Application / NGS
The nano-imprinting process facilitates the formation of wells with a diameter of ≤0.5um, which is difficult to form by i-line lithography.
This is a great advantage in terms of cost for mass production.
Other Advancement of Scivax:
・Optical Design & Simulation
・Wafer size up to 12”
・Chemical surface treatment and process(Hydrophilicity, Hydrophobicity, etc.)
Glass Substrate
Ashing to expose
Glass surface inside hole
Hydrophobicity (e.g. HMDS) surface treatment
Hydrophilicity (e.g.γAPTES)
deposition
Coat Nanoimprinting
Resin
Lift off Nanoimprinting
Resin
Nanoimprint
process
Au nanoparticle treatment to check Hydrophilic surface property
NANOBIC 7-7,
Shinkawasaki,
Saiwai-ku, Kawasaki City,
Kanagawa Prefecture
212-0032