Low cost production solution for NGS

Low cost production solution for NGS

The nano-imprinting process facilitates the formation of wells with a diameter of ≤0.5um, which is difficult to form by i-line lithography.

This is a great advantage in terms of cost for mass production.

Other Advancement of Scivax:

・Optical Design & Simulation
・Wafer size up to 12”
・Chemical surface treatment and process(Hydrophilicity, Hydrophobicity, etc.)

Typical Process Flow

Glass Substrate

Ashing to expose
Glass surface inside hole

Hydrophobicity (e.g. HMDS) surface treatment

Hydrophilicity (e.g.γAPTES)
deposition

Coat Nanoimprinting
Resin

Lift off Nanoimprinting

Resin

Nanoimprint

process

Au nanoparticle treatment to check Hydrophilic surface property

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