Nanoimprint Technology

Nanoimprint

What is Nanoimprint Technology?

SCIVAX can, of course, process silicon wafers, but also wide variety of other substrates including compound semiconductor wafers and large area glass substrates can also be imprinted in our foundry with SCIVAX’s unique single-shot NIL technology.

Features of SCIVAX Nanoimprint Technology

Large Area Nanoimprint Technology

SCIVAX technology has been used in concert with other technologies to allow the first ever large area substrate single-shot nanoimprint pattern transfer.

① Uniform molding technology
② Compliant molding technology for substrates with some warpage or non-flatness
③ Residual Layer Control Technology
④ Auto Mold Release Technology
⑤ Bubble Defect Reduction Technology
⑥ Particle Defect Reduction Technology
⑦ Alignment Technology

G5 (1,100mmX1,300mm) Glass Panel NIL Achieved!

Glass substrate provided by Tokyo Electron KK.
Imprint resin from Toyo Gosei Kougyou KK was used

Available Substrates

SCIVAX can, of course, process silicon wafers, but also wide variety of other substrates including compound semiconductor wafers and large area glass substrates can also be imprinted in our foundry with SCIVAX’s unique single-shot NIL technology.

Residual layers (of imprint resist) can be controlled to thicknesses of 10nm or less
  • Wafer(φ2″~φ12″)
  • Glass (Max Size G5 = 1,100mmX1,300mm)
  • Glass Lens
  • Metal Substrates
  • All types of resin films, sheets, substrates

Total Process Coordination

SCIVAX has established a team of specialists with expertise in each critical technical area to deliver true total nano-foundry process capability from selection of ideal resins, to the NIL process and pre/post processing.

From pilot production to full volume manufacturing

SCIVAX offers its standard molds for sale, and can be used for R&D or basic evaluations of standard nano-patterns.

① Pilot Production with a Test Pattern

Pilot production, proof-of-concept and basic NIL process evaluation can be done using test molds (use of prefabricated molds).

② Pattern Optimization

Once a good result is achieved in pilot production, patterns can be optimized. We encourage customers to take advantage of SCIVAX’s optical simulation, mold fabrication know-how, and foundry services.

③ Fabricate Optimized Pattern Mold

Product prototypes fabricated based on patterns from optimized molds

④ Production Process Development

SCIVAX can perform development of fully production-worth processes.

  • Fabrication of mold for production
  • Customization of production systems
  • Quality Management Standards
⑤ Production Foundry Services

Foundry production is conducted in a high-level, well managed state-of-art facility.

Processing Examples

Substrates of various sizes and materials can be processed
◯Pattern Size: 20nm~a few hundred μm
◯Substrate: All kinds of wafers (silicon, sapphire, compound semiconductor, other), Glass Substrates, Glass Lenses, Metal Substrates, Resin Films/Sheets

Nano-patterning of Resin Films (COP)

Nano-patterning of Glass Substrates

Nano-patterned 6″ Sapphire Wafer

Processing of Anti-reflection Nanostructures (“Moth-Eye”) onto Films

Processing of Anti-reflection onto Lens Surfaces

Processing of 12″ Silicon Wafers

Light diffraction with diffractive optical elements (DOE)

Diffractive Optical Elements (DOE)

Ultra-Hydrophobic Treatment

NIL Samples and Standard Mold Products

NIL samples

SCIVAX has nanoimprinted resin film samples available for sale. The details can be found at the link below:

Standard Mold

SCIVAX has standard NIL molds available for sale. The details can be found at the link below:

Substrate & Resin

Substrate
SubstrateMaximum Size for Molding
Siliconφ12"(300mm)
Sapphire
Compound Semiconductor
Thin Metal Film/Foil
Resin SubstratePlease contact us.
Glass SubstrateG5(1,300mm×1,100mm)
Glass Lensφ50mm、φ25mm
Resin
ClassRaw Materials.
UV Cure ResinEpoxy Type Resin, Acrylic Resin, Urethane Resin
Thermoplastic ResinGeneral Plastic, Engineering Plastics, Super Engineering Plastics
Thermal Cure Resin
OthersVarious Inorganic Materials
PAGE TOP