Custom Mold Fabrication

Custom Mold Fabrication

In addition to molds for NIL replication, SCIVAX can also offer molds for injection molding and various other precision molds.

From small molds for R&D to large area molds for production, we can design and fabricate molds according to customer requirements.

All Types of Molds

Standard Specification Molds

SCIVAX can supply molds fabricated with leading edge semiconductor processing technology.
Mold sizes from 10mm square to φ300mm can be supplied.

L & S

ラインアンドスペース
L&S
Commodity CodeDimension of Structure (仕様)Effective AreaStamp DimensionMaterialArray
MALS250/500/500-30×30Width:250nm, Height:500nm, Pitch:500nm□30mm□40mmSilicon(Si)
NALS250/500/500-30X30 Width:250nm, Height:500nm, Pitch:500nm□30mm□40mmNickel(Ni)
MTLS1/1/2-50×50Width:1μm, Height:1μm, Pitch:2μm□50mm□50mmSilicon(Si)
MTLS1/2/2-50×50Width:1μm, Height:2μm, Pitch:2μm□50mm□50mmSilicon(Si)
MALS5/1/10-30×30Width:5μm, Height:1μm, Pitch:10μm□30mm□40mmSilicon(Si)
NALS5/1/10-30×30Width:5μm, Height:1μm, Pitch:10μm□30mm□40mmNickel(Ni)
NALS500/250/1000-20×20 Width:500nm, Height:250nm, Pitch:1000nm□20mm□30mmNickel(Ni)

Pillar

Pillar

φ230nm

Pillar

Height200nm

Pitch460nm

Commodity CodeDimension of Structure (仕様)Effective AreaStamp DimensionMaterialArray
NAP100/100/400-30X30φ100nm, Height:100nm, Pitch:400nm□30mm□40mmNickel(Ni) Square
MLP230/500/460-φ120φ230nm, Height:500nm, Pitch:460nmφ120mmφ120mmSilicon(Si)Hexagonal
NAP230/100/460-30X30φ230nm, Height:100nm, Pitch:460nm □30mm□40mmNickel(Ni)Hexagonal
NAP230/200/340-30X30φ230nmnm, Height:200nm, Pitch:340nm□30mm□40mmNickel(Ni)Hexagonal
NAP230/200/460-30X30φ230nm, Height:200nm, Pitch:460nm□30mm□40mmNickel(Ni)Square
MLP230/200/460-φ120φ230nm, Height:200nm, Pitch:460nmφ120mmφ120mmSilicon(Si)Hexagonal
NAP230/200/690-30X30φ230nmnm, Height:200nm, Pitch:690nm□30mm□40mmNickel(Ni)Hexagonal
NAP230/200/690-30X30φ230nmnm, Height:200nm, Pitch:690nm□30mm□40mmNickel(Ni)Square
NAP250/500/500-30×30φ250nm, Height:500nm, Pitch:500nm□30mm□40mmNickel(Ni) Hexagonal
NAP250/250/1000-20×20φ250nm, Height:250nm, Pitch:1000nm□20mm□30mmNickel(Ni) Square
NAP270/200/530-30X30φ270nm, Height:200nm, Pitch:530nm□30mm□40mmNickel(Ni)Hexagonal
NAP300/300/600-20×20 φ300nm, Height:300nm, Pitch:600nm□20mm□25mmNickel(Ni)Hexagonal
NAP300/600/600-30X30φ300nm, Height:600nm, Pitch:600nm□20mm□25mmNickel(Ni)Hexagonal
NAP300/600/800-30X30φ300nm, Height:600nm, Pitch:800nm□20mm□25mmNickel(Ni) Square
NAP310/200/620-30X30φ310nm, Height:200nm, Pitch:620nm□30mm□40mmNickel(Ni) Hexagonal
NAP400/200/600-30X30φ400nm, Height:200nm, Pitch:600nm □30mm□40mmNickel(Ni)Hexagonal
NAP400/200/600-30X30φ400nm, Height:200nm, Pitch:600nm□30mm□40mmNickel(Ni) Square
NAP400/400/600-30X30φ400nm, Height:400nm, Pitch:600nm □30mm□40mmNickel(Ni) Square
NAP500/250/1000-20×20φ500nm, Height:250nm, Pitch:1000nm□20mm□30mmNickel(Ni)Square
NAP600/400/800-30X30φ600nm, Height:400nm, Pitch:800nm□30mm□40mmNickel(Ni)Hexagonal
NAP600/400/800-30X30φ600nm, Height:400nm, Pitch:800nm□30mm□40mmNickel(Ni)Square
NAP2000/500/5000-30X30φ2000nm, Height:500nm, Pitch:5000nm□30mm□40mmNickel(Ni)Square

Hole

Hole

φ500nm

Hole

Depth500nm

Pitch4000nm

MAH100/100/400-30X30φ100nm, Depth:100nm, Pitch:400nm□30mm□40mm Silicon(Si)Square
MAH250/500/500-30×30φ250nm, Depth:500nm, Pitch:500nm□30mm□40mm Silicon(Si)Hexagonal
MLH230/200/460-φ120φ230nm, Depth:200nm, Pitch:460nm φ120mm φ120mmSilicon(Si)Hexagonal
MAH300/300/600-30X30φ300nm, Depth:300nm, Pitch:600nm□20mm □25mmSilicon(Si)Hexagonal
MAH300/600/600-30X30φ300nm, Depth:600nm, Pitch:600nm □20mm □25mmSilicon(Si)Hexagonal
MAH300/600/800-30X30φ300nm, Depth:600nm, Pitch:800nm □□20mm □25mmSilicon(Si)Square
MTH500/500/1000φ500nm, Depth:500nm, Pitch:1000nm □50mm□50mmSilicon(Si)Hexagonal
NAH2000/500/5000-30X30φ2000nm, Depth:500nm, Pitch:5000nm□30mm□40mm Nickel(Ni)Square
MTH1.9/2.3/3-50×50φ1.9μm, Depth3.3μm, Pitch3.0μm □50mm□50mmSilicon(Si)Hexagonal

Custom Mold

We can fabricate molds according to customer specifications.
Mold materials include Si, Ni (NiP), stainless steel, fused silica. SCIVAX can select from seven methods of micro/nano patterning and can access the appropriate equipment for all kinds of customer requirements.
SCIVAX can fabricate molds using pattering methods from leading edge processes such as Electron Beam Lithography (EBL) and DUV Lithography to Laser Direct Write to rougher dimension high speed mechanical technologies used for injection molds.

Pattern●Pillar ●Hole ●L&S ●Honeycomb ●Square ●Lens Array ●Blazed ●Retroreflector
Feature SizeSeveral tens of nm ~ Several μm
(a few tens of nm to several micron)
Processing Area□few mm ~ φ12"
Material●Silicon ●SUS ●Ni ●Fused Silica

Pillar

ピラー
ピラー
Range of Possible Features
φ30nm~
Height30nm~
Pitch60nm~
Pattern Area□several mm~φ300mm

Hole

ホール
ホール
Range of Possible Features
φ30nm~
Height30nm~
Pitch60nm~
Pattern Area□several mm~φ300mm

Line and Space

ラインアンドスペース
Range of Possible Features
φ30nm~
Height30nm~
Pitch60nm~
Pattern Area□several mm~φ300mm

Four Types Mixed Pattern

ホール
4種混載
Range of Possible Features
Two-Type and Four-Type mixed patterns (e.g. pillar/hole/L&S, etc.) are possible (same height for whole pattern).
Diameter and width100nm~
Height100nm~
Pitch200nm~
Pattern Area□10mm~50mm

Blazed

ブレーズド
ブレーズド

Lens Array

レンズアレー
レンズアレー

Honeycomb

ハニカム

Square

スクエア

Moth-Eye

モスアイ

Large Area Molds

We can fabricate large area molds based for volume production applications.

SCIVAX can supply 12 inch diameter molds fabricated with advanced semiconductor processing lithographic technology employing super-high stitching field accuracy across the entire mold surface.

Large Area Molds

大面積モールド
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