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Custom Mold Fabrication

We provide not only nanoimprinting but also injection molding and other types of mold for various types of fine molding.

We provide a wide range of services from small molds for R&D to large molds for mass production to meet your needs.

Standard Specification Molds

We offer low-cost Si substrate molds made with the most advanced semiconductor processes.

You can choose from a lineup of mold sizes from 10 mm square to 300 mm diameter.

L & S

Commodity Code	Dimension of Structure	Effective Area	Stamp Dimension	Material	Array
MALS250/500/500-30×30	Width:250nm, Height:500nm, Pitch:500nm	□30mm	□40mm	Silicon(Si)	－
NALS250/500/500-30X30	Width:250nm, Height:500nm, Pitch:500nm	□30mm	□40mm	Nickel(Ni)	－
MTLS1/1/2-50×50	Width:1μm, Height:1μm, Pitch:2μm	□50mm	□50mm	Silicon(Si)	－
MTLS1/2/2-50×50	Width:1μm, Height:2μm, Pitch:2μm	□50mm	□50mm	Silicon(Si)	－
MALS5/1/10-30×30	Width:5μm, Height:1μm, Pitch:10μm	□30mm	□40mm	Silicon(Si)	－
NALS5/1/10-30×30	Width:5μm, Height:1μm, Pitch:10μm	□30mm	□40mm	Nickel(Ni)	－
NALS500/250/1000-20×20	Width:500nm, Height:250nm, Pitch:1000nm	□20mm	□30mm	Nickel(Ni)	－

Pillar

φ230nm

Height200nm

Pitch460nm

Commodity Code	Dimension of Structure	Effective Area	Stamp Dimension	Material	Array
NAP100/100/400-30X30	φ100nm, Height:100nm, Pitch:400nm	□30mm	□40mm	Nickel(Ni)	Square
MLP230/500/460-φ120	φ230nm, Height:500nm, Pitch:460nm	φ120mm	φ120mm	Silicon(Si)	Hexagonal
NAP230/100/460-30X30	φ230nm, Height:100nm, Pitch:460nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP230/200/340-30X30	φ230nmnm, Height:200nm, Pitch:340nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP230/200/460-30X30	φ230nm, Height:200nm, Pitch:460nm	□30mm	□40mm	Nickel(Ni)	Square
MLP230/200/460-φ120	φ230nm, Height:200nm, Pitch:460nm	φ120mm	φ120mm	Silicon(Si)	Hexagonal
NAP230/200/690-30X30	φ230nmnm, Height:200nm, Pitch:690nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP230/200/690-30X30	φ230nmnm, Height:200nm, Pitch:690nm	□30mm	□40mm	Nickel(Ni)	Square
NAP250/500/500-30×30	φ250nm, Height:500nm, Pitch:500nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP250/250/1000-20×20	φ250nm, Height:250nm, Pitch:1000nm	□20mm	□30mm	Nickel(Ni)	Square
NAP270/200/530-30X30	φ270nm, Height:200nm, Pitch:530nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP300/300/600-20×20	φ300nm, Height:300nm, Pitch:600nm	□20mm	□25mm	Nickel(Ni)	Hexagonal
NAP300/600/600-30X30	φ300nm, Height:600nm, Pitch:600nm	□20mm	□25mm	Nickel(Ni)	Hexagonal
NAP300/600/800-30X30	φ300nm, Height:600nm, Pitch:800nm	□20mm	□25mm	Nickel(Ni)	Square
NAP310/200/620-30X30	φ310nm, Height:200nm, Pitch:620nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP400/200/600-30X30	φ400nm, Height:200nm, Pitch:600nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP400/200/600-30X30	φ400nm, Height:200nm, Pitch:600nm	□30mm	□40mm	Nickel(Ni)	Square
NAP400/400/600-30X30	φ400nm, Height:400nm, Pitch:600nm	□30mm	□40mm	Nickel(Ni)	Square
NAP500/250/1000-20×20	φ500nm, Height:250nm, Pitch:1000nm	□20mm	□30mm	Nickel(Ni)	Square
NAP600/400/800-30X30	φ600nm, Height:400nm, Pitch:800nm	□30mm	□40mm	Nickel(Ni)	Hexagonal
NAP600/400/800-30X30	φ600nm, Height:400nm, Pitch:800nm	□30mm	□40mm	Nickel(Ni)	Square
NAP2000/500/5000-30X30	φ2000nm, Height:500nm, Pitch:5000nm	□30mm	□40mm	Nickel(Ni)	Square

Hole

φ500nm

Depth500nm

Pitch4000nm

Commodity Code	Dimension of Structure	Effective Area	Stamp Dimension	Material	Array
MAH100/100/400-30X30	φ100nm, Depth:100nm, Pitch:400nm	□30mm	□40mm	Silicon(Si)	Square
MAH250/500/500-30×30	φ250nm, Depth:500nm, Pitch:500nm	□30mm	□40mm	Silicon(Si)	Hexagonal
MLH230/200/460-φ120	φ230nm, Depth:200nm, Pitch:460nm	φ120mm	φ120mm	Silicon(Si)	Hexagonal
MAH300/300/600-30X30	φ300nm, Depth:300nm, Pitch:600nm	□20mm	□25mm	Silicon(Si)	Hexagonal
MAH300/600/600-30X30	φ300nm, Depth:600nm, Pitch:600nm	□20mm	□25mm	Silicon(Si)	Hexagonal
MAH300/600/800-30X30	φ300nm, Depth:600nm, Pitch:800nm □	□20mm	□25mm	Silicon(Si)	Square
MTH500/500/1000	φ500nm, Depth:500nm, Pitch:1000nm	□50mm	□50mm	Silicon(Si)	Hexagonal
NAH2000/500/5000-30X30	φ2000nm, Depth:500nm, Pitch:5000nm	□30mm	□40mm	Nickel(Ni)	Square
MTH1.9/2.3/3-50×50	φ1.9μm, Depth3.3μm, Pitch3.0μm	□50mm	□50mm	Silicon(Si)	Hexagonal

Custom Mold

We offer a variety of molds that can be manufactured according to our customer’s requirements.

We can fabricate molds in Si, Ni(NiP), SUS and quartz, using seven different methods to cover all sizes required for micro machining.

We also manufacture molds using the latest semiconductor technologies such as EB writing, laser writing, and high-speed writing, as well as injection molding technology (machining).

Pattern	●Pillar ●Hole ●L&S ●Honeycomb ●Square ●Lens Array ●Blazed ●Retroreflector
Feature Size	Several tens of nm ～ Several μm (a few tens of nm to several micron)
Processing Area	□few mm ～ φ12"
Material	●Silicon ●SUS ●Ni ●Fused Silica

Pillar

Range of Possible Features

φ	30nm～
Height	30nm～
Pitch	60nm～
Pattern Area	□several mm～φ300mm

Hole

Range of Possible Features

φ	30nm～
Height	30nm～
Pitch	60nm～
Pattern Area	□several mm～φ300mm

Line and Space

Range of Possible Features

φ	30nm～
Height	30nm～
Pitch	60nm～
Pattern Area	□several mm～φ300mm

Four Types Mixed Pattern

Range of Possible Features

Two-Type and Four-Type mixed patterns (e.g. pillar/hole/L&S, etc.) are possible (same height for whole pattern).

Diameter and width	100nm～
Height	100nm～
Pitch	200nm～
Pattern Area	□10mm～50mm

Blazed

Lens Array

Honeycomb

Square

Moth-Eye

Large Area Molds

We provide large area mold for mass production.

We produce 12 inch diameter mold pattern boundary by using the most advanced semiconductor technology with high precision joints. We can fabricate high precision patterns on the entire surface of 12 inches.