Production Foundry Service Benefits
Example of Volume Production by SCIVAX
Bio Related（Microfluidic, Micro TAS, Cell Culture Plates）
Microfluidic
Microfluidic devices utilizes the micro patterning technology evolved in the MEMS industry to deliver tiny flow channels and wells/reaction chambers for advanced bio-related R&D and engineering.
| Substrate Materials | Fused Silica, Glass or Resin |
| Pattern Size | a few μm ～a few hundreds of μm |
| Molding Method | UV NIL or Thermal NIL |
Cell Cultures
Conventional cell cultures are single layer processes that are very different that the natural situation encountered by cell in vivo. SCIVAX Life Sciences has developed a 3D cell culture system that allows cultures to develop much more similarly to the in vivo case. These special cell culture plates are fabricated with uniform nano-patterns imprinted into resin films.
| Substrate Materials | Resin |
| Pattern Size | a few hundreds of nm ～ a few μm |
| Patterning Method | Thermal NIL |
LED Related（μPSS、nPSS）
PSS (patterned sapphire substrate)
External Quantum Efficiency and brightness of LED devices can be improved by forming nano-patterns on the sapphire substrates.
| Substrate Materials | Sapphire |
| Pattern Size | A few hundreds of nm ～ |
| Patterning Method | UV NIL |
Optical Device Related（Wavelength sensor, encoders, DOEs, lens array, optical filters ）
Ultra-Compact Wavelength Sensor
By forming a surface plasmonic nano-patterns on top of a CMOS image sensor device, accurate wavelength measurement over a wide spectral range is possible.
| Substrate Materials | Silicon |
| Pattern Size | A few hundred nm |
| Patterning Method | UV NIL |
Display Related（Anti-reflection, touch panel, polarizer plates, 3D imaging, other）
Aerial Imaging Element
By using nano-patterning technology to form mirror structures on transparent substrates, images can be made to appear to be projected as standing aerial images.
| Substrate Materials | Resin |
| Pattern Size | A few hundreds of μm |
| Patterning Method | Thermal NIL |
Imprint Processes for All Types of Wafer
The NIL wafer processing flow is as follows:
Overall Production Flow
Overall production flow is as follows:
Specification Review & Production Planning
By utilizing all resources and related technologies, SCIVAX can optimize processes and meet customers’ production requirements.
Production Planning / Prototype Fabrication
Process Review, Materials Acquisition, Mold Fabrication, Imprinting Process (prototype fabrication)
Preproduction Preparation
Preproduction Process Review and Pilot Production can be performed
Full Volume Production
Commence production shipments
Production Improvement
Periodic Review Meetings
NANOBIC 7-7,
Shinkawasaki,
Saiwai-ku, Kawasaki City,
Kanagawa Prefecture
212-0032