Standard Products（Master Mold）

Standard Product Sales | SCIVAX Co., Ltd.

Stock Molds

Stock Mold Sales

We offer Si substrate molds manufactured using state-of-the-art semiconductor processes at competitive prices. Mold sizes range from □10 mm to φ300 mm. The molds listed are available while supplies last.

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Line & Space

L & S (Line & Space)

Example: 50 Si

Commodity Code	Material	Width (nm)	Height (nm)	Pitch (nm)	Stamp (mm)	Eff. Area (mm)
MTLS1/1/2-10x10	Si	1000	1000	2000	□10	—
MTLS1/1/2-300	Si	1000	1000	2000	φ300	□200
MTLS1/2/2-100x100	Si	1000	2000	2000	□100	□80
MRLS50/130/100-30x30	Si	50	130	100	□30	—
MRLS50/130/100-100x100	Si	50	130	100	□100	□80
MRLS50/130/100-300	Si	50	130	100	φ300	φ280
MRLS70/150/140-10x10	Si	70	150	140	□10	—
MRLS70/150/140-52x48	Si	70	150	140	52x48	—
MRLS70/150/140-300	Si	70	150	140	φ300	φ280
NALS500/250/1000	Ni	200	250	1000	□30	□20
NALS520/1000/300	Ni	520	1000	820	□30	□20
NALS870/1500/300	Ni	870	1500	1170	□30	□20

Hole Pattern

Hole

Example: 230 Si

Commodity Code	Material	Width (nm)	Depth (nm)	Pitch (nm)	Array	Stamp (mm)	Eff. Area (mm)
MLH230/200/460-10x10	Si	230	200	460	Hex	□10	—
MLH230/200/460-15x15	Si	230	200	460	Hex	□15	—
MLH230/200/460-20x20	Si	230	200	460	Hex	□20	—
MLH230/200/460-30x30	Si	230	200	460	Hex	□30	—
MLH230/200/460-50x50	Si	230	200	460	Hex	□50	—
MLH230/200/460-4	Si	230	200	460	Hex	φ105	φ85
MLH230/200/460-120	Si	230	200	460	Hex	φ120	φ100
MLH230/200/460-300	Si	230	200	460	Hex	φ300	φ280
MTH-500/500/1000-10×10	Si	500	500	1000	Hex	□10	—
MTH-500/500/1000-30×30	Si	500	500	1000	Hex	□30	—
MTH-500/500/1000-50×50	Si	500	500	1000	Hex	□50	—
MTH-500/500/1000-200	Si	500	500	1000	Hex	φ300	□200

Pillar Pattern

Pillar

Example: 230 500

Commodity Code	Material	Width (nm)	Height (nm)	Pitch (nm)	Array	Stamp (mm)	Eff. Area (mm)
MLP230/500/460-10x10	Si	230	500	460	Hex	□10	—
MLP230/500/460-15x15	Si	230	500	460	Hex	□15	—
MLP230/500/460-20x20	Si	230	500	460	Hex	□20	—
MLP230/500/460-25x25	Si	230	500	460	Hex	□25	—
MLP230/500/460-30x30	Si	230	500	460	Hex	□30	—
MLP230/500/460-35x35	Si	230	500	460	Hex	□35	—
MLP230/500/460-40x40	Si	230	500	460	Hex	□40	—
MLP230/500/460-60x60	Si	230	500	460	Hex	□60	—
MLP230/500/460-120	Si	230	500	460	Hex	φ120	φ100
MLP230/500/460-200x200	Si	230	500	460	Hex	□200	□180
MLP230/200/460-10x10	Si	230	200	460	Hex	□10	—
MLP230/200/460-15x15	Si	230	200	460	Hex	□15	—
MLP230/200/460-20×20	Si	230	200	460	Hex	□20	—
MLP230/200/460-25x25	Si	230	200	460	Hex	□25	—
MLP230/200/460-30×30	Si	230	200	460	Hex	□30	—
MLP230/200/460-50x50	Si	230	200	460	Hex	□50	—
MLP230/200/460-120	Si	230	200	460	Hex	φ120	φ100
MLP230/200/460-300	Si	230	200	460	Hex	φ300	φ280
MRP2200/2000/3000-200	Si	2400	2000	3000	Hex	φ200	φ180
NAP230/240-100	Ni	230	240	460	Hex	□100	□80

AR-TEG

Parts Number	Material	Stamp Dimension	Layout
TEG-AR-C-200	Si	φ200 mm	Checkerboard (52 patterned / 45 blanket shots)
TEG-AR-C-30x30	Si	Approx. 30×30 mm	Checkerboard (2 patterned / 2 blanket shots)
TEG-AR-F-200	Si	φ200 mm	Full pattern (97 patterned shots)
TEG-AR-F-30x30	Si	Approx. 30×30 mm	Full pattern (4 patterned shots)

For details on the AR-TEG pattern structure (a mix of L/S and Pillar), please contact us separately. The molds listed are available while supplies last.

Checkerboard / Full Pattern Diagram

Patterned Layout for Single Shot Diagram

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Product Lineup

01 Nanoimprint Equipment 02 Optical Module Devices 03 Lenses for Sensor Light Sources 04 Standard Product Sales

Contact

Please feel free to contact us for stock checks and quotations.

The molds listed are available while supplies last. Please feel free to consult us regarding stock availability, pricing, and custom specifications.

Stock Check / Contact Us

Commodity Code	Pattern	Pattern Dimension	Pattern Area	Size
FALS1000/1000/2000-30×30	L&S	Width 1 µm, height 1 µm, pitch 2 µm	□30 mm	□40 mm
FTLS1000/2000/2000-100×100	L&S	Width 1 µm, height 2 µm, pitch 2 µm	□100 mm	□120 mm
FCLS/200-4×4	L&S	Width 75/100/150/200 nm, height 200 nm, pitch 150/200/300/400 nm	□4 mm × 4	□40 mm
FLH230/500-120	Hole	φ230 nm, depth 500 nm, pitch 460 nm (triangular lattice)	φ120 mm	□130 mm
FLH230/200-120	Hole	φ230 nm, depth 200 nm, pitch 460 nm (triangular lattice)	φ120 mm	□130 mm
FLP230/200-120	Pillar	φ230 nm, height 200 nm, pitch 460 nm (triangular lattice)	φ120 mm	□130 mm
FTP500/500-50×50	Pillar	φ500 nm, height 500 nm, pitch 1000 nm (triangular lattice)	□50 mm	□70 mm
FMES250/300-100×100	Moth-eye	Moth-eye, single-sided molding	□100 mm	□120 mm
FRA50/25-10×10	Lens Array	φ50 µm, height 25 µm (hemisphere), pitch 100 µm	□10 mm	□70 mm

Standard Products（Master Mold）

L & S (Line & Space)

Hole

Pillar

AR-TEG

Resin Film Samples

Nanoimprint Molded Sample List

Glass Substrate Samples

Product Features

Product Specifications

Reliability Testing (Reference)