Frequently Asked Questions
We have compiled the questions and answers we receive most frequently from customers regarding nanoimprint contract services, molding processes, equipment, and materials, organized by category. Keyword search is also available.
Contract Evaluation Services
We can accommodate various inspections according to your requirements. We can perform optical macro inspection, confocal microscopy, cross-sectional SEM observation, AFM measurement, film thickness measurement, and more.
Whether we can support this depends on the measurement details, so please contact us to discuss your requirements.
This depends on the pattern geometry and the molding resin, so please contact us to discuss the details.
Providing spin-curve data helps streamline the review of film thickness conditions. In addition, if you have n and k data from an ellipsometer, more accurate film thickness evaluation is possible.
For an initial evaluation, approximately 50 g is sufficient. If continuous moldability evaluation is required, we will ask you to provide additional resin according to the number of samples to be evaluated.
We evaluate coatability, film thickness, aging changes, and pattern transferability (SEM observation), among other items.
We use a non-contact optical film thickness measurement system.
Process Molding Conditions
This depends on mold uniformity, pattern geometry, and the resin used; however, under appropriate conditions, control down to approximately 20 nm is possible.
We can support sizes from approximately φ10 mm. However, this varies depending on pressurization conditions and other factors, so please contact us to discuss the details.
This depends on the curing energy of the resin used, but under typical conditions it is within 3 minutes per piece.
This depends on the pattern geometry and resin flowability, but in general it can be controlled to about 5–10% of the pattern height.
Pitch accuracy is less than 0.05 nm, and pattern geometry accuracy is ±5%. With nanoimprint molding, there is almost no shape difference from the master mold.
We can support gentle curved surfaces (waviness of approximately 1–2 mm per Φ100 mm). However, we do not support molding on samples with large curvature, such as lenses.
Molds Materials
We can also support "release-agent-free resin," which does not require release treatment.
We support UV-curable resins and thermosetting resins. We have a proven track record with materials such as PDMS, epoxy, and polyimide.
The main resins used for optical components offer reliability equivalent to automotive grade.
We have experience with both filled and unfilled resins. Our highest achieved refractive index is approximately 1.9.
Molding Capability Track Record
Yes. Depending on the pattern design, we have achieved transfer with an aspect ratio exceeding 10.
This depends on the pattern design, but we have a track record of molding inverse-taper shapes. Separate verification is required for mass production applications.
We have a track record of molding up to an aspect ratio of approximately 7. Separate evaluation is required to determine applicability in mass production.
Using our proprietary fluid forming technology, we achieve uniform pressure distribution across the entire surface and low-pressure molding, enabling molding on compound semiconductor substrates while minimizing damage to the substrate.
By appropriately selecting the substrate and resin materials, we can provide products with reflow resistance.
At present, we do not accept contract prototyping of moth-eye structures. However, we do sell samples of molded moth-eye structures.
We have mass production experience with biochips, optical lenses, optical sensors, and more.
There is a wide range of applications, including mobile communications, automotive, robotics, bio, semiconductors, and optoelectronic convergence fields. It is used in products that require nanoscale processing and high-precision microfabrication.
Equipment (RubiQ® / Dyad®)
For our prototyping and mass production, we use sheet-fed nanoimprint equipment.
If the size fits within φ100 mm, we can support it by fabricating a dedicated tray.
Depending on the pattern geometry, it is equipped with an automatic demolding function.
We support alignment accuracy of ±1 μm or better.
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The content provided here presents representative questions and answers regarding nanoimprint lithography. Support availability and specifications may vary depending on pattern geometry, materials used, and molding conditions, so please contact us to discuss details individually.