{"id":13130,"date":"2026-03-03T14:42:47","date_gmt":"2026-03-03T05:42:47","guid":{"rendered":"https:\/\/d22ryn5zdhpjm8.cloudfront.net\/technology\/technical-terms\/"},"modified":"2026-06-24T17:32:27","modified_gmt":"2026-06-24T08:32:27","slug":"technical-terms","status":"publish","type":"page","link":"https:\/\/www.scivax.com\/en\/technology\/technical-terms\/","title":{"rendered":"Technical Terms"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"13130\" class=\"elementor elementor-13130 elementor-647\" data-elementor-post-type=\"page\">\n\t\t\t\t<div class=\"elementor-element elementor-element-878b21e e-flex e-con-boxed e-con e-parent\" data-id=\"878b21e\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-69b29f5 elementor-widget elementor-widget-html\" data-id=\"69b29f5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"html.default\">\n\t\t\t\t\t<div>\n\n\n<meta charset=\"UTF-8\">\n<meta name=\"viewport\" content=\"width=device-width, initial-scale=1.0\">\n<title>Nanoimprint Glossary | SCIVAX<\/title>\n<style>\n  @import url('https:\/\/fonts.googleapis.com\/css2?family=Noto+Sans+JP:wght@400;500;700&family=DM+Sans:wght@400;500;600;700&display=swap');\n\n  :root {\n    --accent: #1D9E75;\n    --accent-light: #E1F5EE;\n    --accent-mid: #0F6E56;\n    --accent-dark: #085041;\n    --ink: #1a1a1a;\n    --ink-soft: #4a4a4a;\n    --ink-muted: #888780;\n    --surface: #ffffff;\n    --surface-alt: #F7F8F5;\n    --border: rgba(0,0,0,0.09);\n    --font-body: 'Noto Sans JP', sans-serif;\n    --font-display: 'DM Sans', 'Noto Sans JP', sans-serif;\n  }\n\n  *, *::before, *::after { box-sizing: border-box; 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You can perform a filtered search using keywords.<\/p>\n  <\/div>\n\n  <div class=\"gl-search-wrap\">\n    <svg viewbox=\"0 0 24 24\"><circle cx=\"11\" cy=\"11\" r=\"7\"><\/circle><line x1=\"16.5\" y1=\"16.5\" x2=\"22\" y2=\"22\"><\/line><\/svg>\n    <input class=\"gl-search\" type=\"search\" id=\"glossarySearch\" placeholder=\"Search terms... e.g., mold, resist, etching\">\n  <\/div>\n\n  <div class=\"gl-list\" id=\"glossaryList\">\n\n    <!-- 1 -->\n    <div class=\"gl-item\" data-term=\"\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc NIL\" data-def=\"\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u3092\u3001\u30e2\u30fc\u30eb\u30c9\uff08\u578b\uff09\u3092\u4ecb\u3057\u3066\u6a39\u8102\u3084\u8584\u819c\u57fa\u677f\u306b\u76f4\u63a5\u8ee2\u5199\u3059\u308b\u52a0\u5de5\u6280\u8853\u3002\u5149\u5b66\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3068\u7570\u306a\u308a\u3001\u6ce2\u9577\u306b\u3088\u308b\u89e3\u50cf\u5ea6\u5236\u7d04\u3092\u53d7\u3051\u305a\u3001\u6570\u5341 nm \u4ee5\u4e0b\u306e\u69cb\u9020\u5f62\u6210\u304c\u53ef\u80fd\u3002\u5f62\u72b6\u518d\u73fe\u6027\u306b\u512a\u308c\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u306b\u6bd4\u3079\u4f4e\u30b3\u30b9\u30c8\u306e\u91cf\u7523\u6280\u8853\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>01<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Nanoimprint Lithography<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A processing technology that directly transfers nanoscale fine patterns onto resins or thin-film substrates via a mold (template). Unlike optical lithography, it is not subject to resolution constraints based on wavelength, enabling the formation of structures of several tens of nm or less. It offers excellent shape reproducibility and is a mass-production technology with lower costs compared to photolithography.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 2 -->\n    <div class=\"gl-item\" data-term=\"\u5927\u9762\u7a4d\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8 Large-Area Imprint\" data-def=\"\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\uff08NIL\uff09\u6280\u8853\u3092\u7528\u3044\u3066\u3001\u5927\u53e3\u5f84\u30a6\u30a7\u30cf\u3084\u30de\u30b6\u30fc\u30ac\u30e9\u30b9\u57fa\u677f\u306a\u3069\u306e\u5927\u578b\u57fa\u677f\u5168\u4f53\u306b\u5747\u4e00\u306b\u30d1\u30bf\u30fc\u30f3\u3092\u8ee2\u5199\u3059\u308b\u6280\u8853\u3067\u3042\u308a\u3001\u4e00\u62ec\u51e6\u7406\u3059\u308b\u3082\u306e\u3001Roll to Roll\u3084Roll to Plate\u306a\u3069\u306e\u88c5\u7f6e\u304c\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>02<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Large-Area Imprint<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A technology that uses Nanoimprint Lithography (NIL) to uniformly transfer patterns across large substrates, such as large-diameter wafers or mother glass substrates. Equipment includes batch processing systems as well as Roll-to-Roll and Roll-to-Plate systems.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 3 -->\n    <div class=\"gl-item\" data-term=\"\u30de\u30b9\u30bf\u30fc\u30e2\u30fc\u30eb\u30c9 \u30de\u30b9\u30bf\u30fc\u91d1\u578b\" data-def=\"\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\uff08NIL\uff09\u306b\u304a\u3044\u3066\u3001\u30d1\u30bf\u30fc\u30f3\u8ee2\u5199\u306e\u539f\u7248\u3068\u306a\u308b\u91d1\u578b\u3002\u96fb\u5b50\u7dda\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\uff08EBL\uff09\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3068\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u3067Si\u3084\u77f3\u82f1\u306b\u5f62\u6210\u3059\u308b\u3082\u306e\u304c\u4e00\u822c\u7684\u3060\u304c\u3001\u30d1\u30bf\u30fc\u30f3\u30b5\u30a4\u30ba\u306b\u3088\u308a\u3001\u5207\u524a\u3001Ni\u96fb\u92f3\u306a\u3069\u304c\u3042\u308b\u3002\u5834\u5408\u306b\u3088\u308a\u3001\u30b9\u30c6\u30c3\u30d7\uff06\u30ea\u30d4\u30fc\u30c8\u6cd5\u3067\u4f5c\u6210\u3057\u305f\u6a39\u8102\u88fd\u306e\u3082\u306e\u3082\u6a39\u8102\u30de\u30b9\u30bf\u30fc\u30e2\u30fc\u30eb\u30c9\u3068\u547c\u3076\u3053\u3068\u304c\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>03<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Master Mold<br\/>Master Template<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>The original template used for pattern transfer in Nanoimprint Lithography (NIL). These are generally formed on Si or quartz using Electron Beam Lithography (EBL) or photolithography combined with dry etching. Depending on the pattern size, cutting or Ni electroforming may also be used. Resin versions created using the step-and-repeat method are sometimes referred to as \"resin master molds.\"<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 4 -->\n    <div class=\"gl-item\" data-term=\"\u57fa\u677f \u57fa\u6750 \u30ac\u30e9\u30b9 Si \u6a39\u8102\u30d5\u30a3\u30eb\u30e0\" data-def=\"\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\u3067\u6a39\u8102\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u3092\u5f62\u6210\u3059\u308b\u4e0b\u5730\u306e\u3053\u3068\u3067\u3001\u30ac\u30e9\u30b9\u3001Si\u3001\u5316\u5408\u7269\u534a\u5c0e\u4f53\u3001\u6a39\u8102\u30d5\u30a3\u30eb\u30e0\u306a\u3069\u304c\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>04<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Substrate \/ Base Material<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>The base material on which fine resin patterns are formed during the nanoimprint process. Various materials such as glass, Si, compound semiconductors, and resin films are utilized.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 5 -->\n    <div class=\"gl-item\" data-term=\"\u30ec\u30d7\u30ea\u30ab \u30ef\u30fc\u30ad\u30f3\u30b0\u30e2\u30fc\u30eb\u30c9 \u8907\u88fd\" data-def=\"\u30de\u30b9\u30bf\u30fc\u30e2\u30fc\u30eb\u30c9\u3092\u539f\u7248\u3068\u3057\u3066\u5c02\u7528\u306e\u30ec\u30d7\u30ea\u30ab\u6a39\u8102\u306b\u3088\u308a\u8907\u88fd\u3055\u308c\u308b\u6a39\u8102\u30e2\u30fc\u30eb\u30c9\u306e\u3053\u3068\u3002\u30de\u30b9\u30bf\u30fc\u306e\u76f4\u63a5\u4f7f\u7528\u306b\u3088\u308b\u6469\u8017\u30fb\u7834\u640d\u3092\u907f\u3051\u308b\u70ba\u3001\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u57fa\u677f\u3092\u6210\u578b\u3059\u308b\u969b\u306b\u4f7f\u7528\u3059\u308b\u3002\u30d1\u30bf\u30fc\u30f3\u3084\u8981\u6c42\u7279\u6027\u306b\u3088\u308a\u3001\u6570\u5341\u56de\u7a0b\u5ea6\u306e\u7e70\u308a\u8fd4\u3057\u4f7f\u7528\u3067\u306e\u4ea4\u63db\u304c\u4e00\u822c\u7684\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>05<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Replica<br\/>Working Mold<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A resin mold duplicated from a master mold using a specialized replica resin. These are used for molding the imprint substrate to avoid wear or damage to the master mold from direct use. Depending on the pattern and required characteristics, they are typically replaced after several dozen uses.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 6 -->\n    <div class=\"gl-item\" data-term=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ec\u30b8\u30b9\u30c8 \u30ec\u30b8\u30f3 \u6a39\u8102 UV \u71b1\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\" data-def=\"UV\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306e\u5834\u5408\u3001UV\u5149\uff08\u901a\u5e38i\u7dda\uff09\u3067\u786c\u5316\u3059\u308b\u7279\u6027\u3092\u6301\u3063\u305f\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u7528\u9014\u5c02\u7528\u306e\u6a39\u8102\u6eb6\u6db2\u3002\u71b1\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u306e\u5834\u5408\u3001\u71b1\u53ef\u5851\u6027\u3042\u308b\u3044\u306f\u71b1\u786c\u5316\u6027\u306e\u7279\u6027\u3092\u6301\u3063\u305f\u6a39\u8102\u304c\u4f7f\u7528\u3055\u308c\u3001\u6eb6\u6db2\u72b6\u306e\u3082\u306e\u3084\u30b7\u30fc\u30c8\u72b6\u306e\u3082\u306e\u304c\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>06<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Imprint Resist<br\/>Resin<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>In the case of UV imprinting, this refers to a resin solution specifically for imprinting that hardens when exposed to UV light (usually i-line). For thermal imprinting, thermoplastic or thermosetting resins are used, available in solution or sheet form.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 7 -->\n    <div class=\"gl-item\" data-term=\"\u96e2\u578b\u51e6\u7406 \u5265\u96e2 \u8868\u9762\u51e6\u7406 \u30e2\u30fc\u30eb\u30c9\" data-def=\"\u30de\u30b9\u30bf\u30fc\u30e2\u30fc\u30eb\u30c9\u304b\u3089\u30ec\u30d7\u30ea\u30ab\u30e2\u30fc\u30eb\u30c9\u3092\u4f5c\u6210\u3059\u308b\u969b\u3001\u96e2\u578b\u6642\u306b\u30de\u30b9\u30bf\u30fc\u30e2\u30fc\u30eb\u30c9\u8868\u9762\u3078\u306e\u6a39\u8102\u4ed8\u7740\u3092\u9632\u304e\u5265\u96e2\u6027\u3092\u5411\u4e0a\u3059\u308b\u76ee\u7684\u3067\u4e8b\u524d\u306b\u884c\u3046\u51e6\u7406\u306e\u3053\u3068\u3002\u30ec\u30d7\u30ea\u30ab\u30e2\u30fc\u30eb\u30c9\u306e\u8868\u9762\u306b\u884c\u3046\u5834\u5408\u3082\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>07<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Release Treatment<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A treatment performed in advance when creating a replica mold from a master mold to prevent resin adhesion to the master mold surface and improve separation. It is also sometimes applied to the surface of the replica mold.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 8 -->\n    <div class=\"gl-item\" data-term=\"VUV\u51e6\u7406 \u7d2b\u5916\u7dda \u30af\u30ea\u30fc\u30cb\u30f3\u30b0 \u8868\u9762\u6d3b\u6027\u5316\" data-def=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u57fa\u677f\u306e\u30d7\u30e9\u30a4\u30de\u30fc\u51e6\u7406\u524d\u306b\u884c\u308f\u308c\u308b\u3053\u3068\u304c\u3042\u308b\u3001VUV\u5149\u306b\u3088\u308b\u30c9\u30e9\u30a4\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u3001\u8868\u9762\u6d3b\u6027\u5316\u51e6\u7406\u306e\u3053\u3068\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>08<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">VUV Treatment<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A dry cleaning and surface activation treatment using VUV light, which may be performed before the primer treatment of the imprint substrate.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 9 -->\n    <div class=\"gl-item\" data-term=\"\u30d7\u30e9\u30a4\u30de\u30fc \u5bc6\u7740 \u30b7\u30e9\u30f3\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0 \u8868\u9762\u51e6\u7406\" data-def=\"\u57fa\u6750\u3068\u6210\u578b\u7528\u6a39\u8102\u306e\u5bc6\u7740\u3092\u4fc3\u9032\u3059\u308b\u85ac\u6db2\u3002UV\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u3092\u30ac\u30e9\u30b9\u57fa\u677f\u7b49\u306b\u51e6\u7406\u3059\u308b\u5834\u5408\u3001\u57fa\u677f\u306e\u8868\u9762\u306b\u3042\u3089\u304b\u3058\u3081\u30b7\u30e9\u30f3\u30ab\u30c3\u30d7\u30ea\u30f3\u30b0\u5264\u306a\u3069\u3092\u5857\u5e03\u3057\u3066\u8868\u9762\u51e6\u7406\u3092\u5b9f\u65bd\u3059\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>09<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Primer<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A chemical solution that promotes adhesion between the substrate and the molding resin. When applying UV imprinting to glass substrates or similar materials, a surface treatment is performed by pre-coating the substrate surface with a silane coupling agent.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 10 -->\n    <div class=\"gl-item\" data-term=\"\u6b8b\u819c RLT Residual Layer Thickness\" data-def=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u6210\u578b\u57fa\u677f\u4e0a\u306e\u30d1\u30bf\u30fc\u30f3\u4ee5\u5916\u306e\u90e8\u5206\u306b\u6b8b\u308b\u8584\u3044\u6a39\u8102\u819c\u306e\u3053\u3068\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>10<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Residual Layer \/ RLT<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>The thin resin film that remains on the molded substrate in areas other than the pattern during the imprint process.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 11 -->\n    <div class=\"gl-item\" data-term=\"\u72a0\u7272\u819c \u30a8\u30c3\u30c1\u30f3\u30b0\u30de\u30b9\u30af \u4e00\u6642\u819c\" data-def=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u5f62\u6210\u3055\u308c\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u30de\u30b9\u30af\u3068\u3057\u3066\u6a5f\u80fd\u3057\u6700\u7d42\u7684\u306b\u306f\u53d6\u308a\u9664\u304b\u308c\u308b\u304c\u3001\u4e00\u6642\u7684\u306b\u5f62\u6210\u3055\u308c\u308b\u819c\u306e\u3053\u3068\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>11<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Sacrificial Layer<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A film formed during the imprint process that functions as an etching mask and is eventually removed, serving only as a temporary structure.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 12 -->\n    <div class=\"gl-item\" data-term=\"\u6c38\u4e45\u819c \u30c7\u30d0\u30a4\u30b9\u69cb\u9020 \u6700\u7d42\u69cb\u9020\" data-def=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u5f62\u6210\u3055\u308c\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6700\u7d42\u69cb\u9020\u3068\u3057\u3066\u6b8b\u308b\u819c\u306e\u3053\u3068\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>12<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Permanent Layer<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>A film formed during the imprint process that remains as the final structure of the device.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 13 -->\n    <div class=\"gl-item\" data-term=\"\u96e2\u578b \u30c7\u30e2\u30fc\u30eb\u30c9 \u5265\u96e2 \u30e2\u30fc\u30eb\u30c9\" data-def=\"\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u6a39\u8102\u786c\u5316\u5f8c\u306b\u3001\u30ec\u30d7\u30ea\u30ab\u30e2\u30fc\u30eb\u30c9\u3092\u6a39\u8102\u8868\u9762\u304b\u3089\u5265\u304c\u3059\u3053\u3068\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>13<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Release \/ Demolding<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>The process of peeling the replica mold away from the resin surface after the imprint resin has cured.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 14 -->\n    <div class=\"gl-item\" data-term=\"\u30c6\u30fc\u30d1\u30fc\u89d2 \u5074\u58c1 \u50be\u659c \u30d1\u30bf\u30fc\u30f3\u5f62\u72b6\" data-def=\"\u5fae\u7d30\u30d1\u30bf\u30fc\u30f3\u5f62\u72b6\u306e\u5074\u58c1\u306b\u304a\u3044\u3066\u3001\u57fa\u5e95\u90e8\uff08\u57fa\u677f\u5074\uff09\u304b\u3089\u30d1\u30bf\u30fc\u30f3\u9802\u70b9\u306b\u5411\u304b\u3046\u50be\u659c\u89d2\u5ea6\u3002\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u5de5\u7a0b\u306b\u304a\u3044\u3066\u306f\u3001\u82e5\u5e72\u30c6\u30fc\u30d1\u30fc\u89d2\u304c\u3064\u3044\u3066\u3044\u308b\uff08\u30d1\u30bf\u30fc\u30f3\u9802\u70b9\u304c\u7d30\u304f\u306a\u308b\uff09\u65b9\u304c\u96e2\u578b\u304c\u5bb9\u6613\u306b\u306a\u308a\u3001\u9006\u30c6\u30fc\u30d1\u30fc\u3067\u306f\u96e2\u578b\u304c\u96e3\u3057\u304f\u306a\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>14<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">Taper Angle<\/div>\n          <div class=\"gl-term-en\"><\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>The angle of inclination on the sidewall of a fine pattern, from the base (substrate side) toward the top of the pattern. In the imprinting process, a slight taper angle (where the top of the pattern is narrower) makes demolding easier, while an inverse taper makes demolding difficult.<\/p><\/div>\n      <\/div>\n    <\/div>\n\n    <!-- 15 -->\n    <div class=\"gl-item\" data-term=\"DOE \u56de\u6298\u578b\u5149\u5b66\u7d20\u5b50 Diffractive Optical Element \u62e1\u6563 0\u6b21\u5149\" data-def=\"\u56de\u6298\u578b\u5149\u5b66\u7d20\u5b50\u3001Diffractive Optical Element\u306e\u7565\u3002\u5fae\u7d30\u306a\u9ad8\u3055\u69cb\u9020\uff08\u968e\u6bb5\u72b6\u7b49\uff09\u306e\u69cb\u6210\u306b\u3088\u308a\u3001\u5165\u5c04\u5149\u306e\u4f4d\u76f8\u3084\u632f\u5e45\u3001\u5f37\u5ea6\u5206\u5e03\u3092\u4efb\u610f\u306b\u5236\u5fa1\u53ef\u80fd\u3002\u8907\u96d1\u306a\u5149\u7dda\u5206\u5e03\u3092\u751f\u6210\u53ef\u80fd\u306a\u4e00\u65b9\u3001\u5165\u5c04\u5149\u306e\u4e00\u90e8\u304c\u56de\u6298\u3055\u308c\u305a\u306b\u901a\u904e\u3059\u308b0\u6b21\u5149\u304c\u5f37\u3044\u5149\u70b9\u3068\u3057\u3066\u751f\u3058\u308b\u3053\u3068\u3082\u3042\u308b\u3002\">\n      <div class=\"gl-item-inner\">\n        <div class=\"gl-num\"><span>15<\/span><\/div>\n        <div class=\"gl-term\">\n          <div class=\"gl-term-ja\">DOE<\/div>\n          <div class=\"gl-term-en\">Diffractive Optical Element<\/div>\n        <\/div>\n        <div class=\"gl-def\"><p>While often used as an abbreviation for Design of Experiments, in the field of NIL, it refers to a Diffractive Optical Element. By configuring fine height structures (such as stepped structures), the phase, amplitude, and intensity distribution of incident light can be controlled arbitrarily. While it can generate complex light distributions, it may also produce a strong light spot known as zero-order light, where part of the incident light passes through without being diffracted.<br\/><br\/>[Reference] \u21d2 Our diffusion optical element (diffuser) that does not generate zero-order light: <a class=\"ref-link\" href=\"https:\/\/d22ryn5zdhpjm8.cloudfront.net\/platanus\/\">Platanus<\/a><\/p><\/div>\n      <\/div>\n    <\/div>\n\n  <\/div><!-- \/gl-list -->\n\n  <div class=\"gl-empty\" id=\"glossaryEmpty\">\n    <svg viewbox=\"0 0 24 24\"><circle cx=\"11\" cy=\"11\" r=\"7\"><\/circle><line x1=\"16.5\" y1=\"16.5\" x2=\"22\" y2=\"22\"><\/line><line x1=\"8\" y1=\"11\" x2=\"14\" y2=\"11\"><\/line><\/svg>\n    <p>No terms matching \"<span id=\"emptyKeyword\"><\/span>\" were found.<\/p>\n  <\/div>\n\n  <p class=\"gl-footnote\">The content provided covers representative terms and definitions related to Nanoimprint Lithography. Definitions may vary depending on technological advancements or specific applications.<\/p>\n\n<\/main>\n\n<script>\n  const searchInput = document.getElementById('glossarySearch');\n  const items = document.querySelectorAll('.gl-item');\n  const emptyState = document.getElementById('glossaryEmpty');\n  const emptyKeyword = document.getElementById('emptyKeyword');\n\n  function escapeRegex(str) {\n    return str.replace(\/[.*+?^${}()|[\\]\\\\]\/g, '\\\\$&');\n  }\n\n  function highlight(text, keyword) {\n    if (!keyword) return text;\n    const re = new RegExp('(' + escapeRegex(keyword) + ')', 'gi');\n    return text.replace(re, '<mark>$1<\/mark>');\n  }\n\n  function restoreOriginal(item) {\n    const termJa = item.querySelector('.gl-term-ja');\n    const termEn = item.querySelector('.gl-term-en');\n    const defP = item.querySelector('.gl-def p');\n    if (item._orig) {\n      termJa.innerHTML = item._orig.ja;\n      termEn.innerHTML = item._orig.en;\n      defP.innerHTML = item._orig.def;\n    }\n  }\n\n  function applyHighlight(item, keyword) {\n    const termJa = item.querySelector('.gl-term-ja');\n    const termEn = item.querySelector('.gl-term-en');\n    const defP = item.querySelector('.gl-def p');\n    if (!item._orig) {\n      item._orig = {\n        ja: termJa.innerHTML,\n        en: termEn.innerHTML,\n        def: defP.innerHTML\n      };\n    }\n    termJa.innerHTML = highlight(item._orig.ja, keyword);\n    termEn.innerHTML = highlight(item._orig.en, keyword);\n    defP.innerHTML = highlight(item._orig.def, keyword);\n  }\n\n  searchInput.addEventListener('input', function () {\n    const q = this.value.trim();\n    let visibleCount = 0;\n\n    items.forEach(function (item) {\n      const searchTarget = (\n        item.dataset.term + ' ' + item.dataset.def\n      ).toLowerCase();\n\n      if (!q || searchTarget.includes(q.toLowerCase())) {\n        item.classList.remove('is-hidden');\n        visibleCount++;\n        if (q) {\n          applyHighlight(item, q);\n        } else {\n          restoreOriginal(item);\n        }\n      } else {\n        item.classList.add('is-hidden');\n        restoreOriginal(item);\n      }\n    });\n\n    if (visibleCount === 0) {\n      emptyState.style.display = 'block';\n      emptyKeyword.textContent = q;\n    } else {\n      emptyState.style.display = 'none';\n    }\n  });\n<\/script>\n\n\n<\/div>\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"Nanoimprint Glossary | SCIVAX Nanoimprint Technology Glossary This glossary explains key terms related to the processes, materials, and equipment used in Nanoimprint Lithography (NIL). You can perform a filtered search using keywords. 01 Nanoimprint Lithography A processing technology that directly transfers nanoscale fine patterns onto resins or thin-film substrates via a mold (template). Unlike optical [&hellip;]","protected":false},"author":1,"featured_media":13870,"parent":245,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-13130","page","type-page","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/pages\/13130","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/comments?post=13130"}],"version-history":[{"count":2,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/pages\/13130\/revisions"}],"predecessor-version":[{"id":14010,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/pages\/13130\/revisions\/14010"}],"up":[{"embeddable":true,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/pages\/245"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/media\/13870"}],"wp:attachment":[{"href":"https:\/\/www.scivax.com\/en\/wp-json\/wp\/v2\/media?parent=13130"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}