Feature of SCIVAX’s Nanoimprint Technology

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Make 'Scientific Value' become 'Society Value'

"Nanoimprint onto large area" open up the future of super nanofabrication technology


With our originally developed Large Area Nanoimprint Technology, the cost for processing can be drastically reduced, so it is spreading to various applications now.
“For large area glass: single-shot fabrication on G5 (1,100mm X1,300mm)” and “For wafer fabrication: high throughput at most 160 pieces/hour” can be done.

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Nanoimprint Foundry Service (Volume Production Service)

Only with Nanoimprint Technology, a volume production can’t be realized. We make an effort for the fusion technology which is required for practical application, then we have constructed our original Foundry Platform for nanoscale patterning. Using our Foundry Service, you can drastically shorten your development time for new products.

SCIVAX's Nanoimprint Technology

・Single-shot fabrication on large area
Single-shot fabrication at most G5 (1,100mmX1,300mm) substrate
Single-shot fabrication for multiple substrates
・Nanoimprint for substrates with some warpage or non-flatness
Single-shot fabrication for substrates that flatness is not guaranteed
・Nanoimprint onto inorganic substrates
Fabrication onto other materials (Such as SiO2)
・Nanoimprint onto curved surfaces
Fabrication onto curved surfaces, which include lens surface (concave or convex)

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Alignment Technology

The global alignment accuracy across wafer (φ8”) is ±3μm.

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  • Measure a position gap between master mold and fabricated wafer
  • Using Nanoimprint technology with high accuracy, alignment error can be controlled within ±3μm

Pattern transfer with high accuracy

For L&S with 100nm pitch, we can fabricate a pattern with precision less than 0.1nm.

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Some examples of our processing technology

  • Patterning onto sapphire substrates or compound semiconductors

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    Uniform patterning onto substrates with some warpage or non-flatness can be done.

  • Patterning onto lens curved surfaces

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    Molding onto lens surfaces (concave, convex, and both) can be done.

  • Patterning onto resin

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    We have many patterning experiences onto resin film/substrate.

  • Patterning onto large-area glass substrates

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    Uniform patterning at most G5 (1,100mmX1,300mm) substrate can be done.
    Glass substrate: Offered by Tokyo Electron、Ltd.
    Resin composition for imprint: Made in Toyo Gosei Co., Ltd.