MRLS50/130/100-10×10 | Width:50nm, Height:130nm, Pitch:100nm | □10mm | □10mm | Silicon(Si) | - |
MRLS50/130/100-30×30 | Width:50nm, Height:130nm, Pitch:100nm | □30mm | □30mm | Silicon(Si) | - |
MRLS50/130/100-100×100 | Width:50nm, Height:130nm, Pitch:100nm | □100mm | □100mm | Silicon(Si) | - |
MTPL50/130/100-300 | Width:50nm, Height:130nm, Pitch:100nm | φ280㎜ | φ300㎜ | Silicon(Si) | - |
MRLS70/150/140-10×10 | Width:70nm, Height:150nm, Pitch:140nm | □10mm | □10mm | Silicon(Si) | - |
MRLS70/150/140-300 | Width:70nm, Height:150nm, Pitch:140nm | φ280㎜ | φ300㎜ | Silicon(Si) | - |
MTLS1/1/2-30×30 | Width:1μm, Height:1μm, Pitch:2μm | □30mm | □30mm | Silicon(Si) | - |